{"id":7992,"date":"2023-07-17T15:05:04","date_gmt":"2023-07-17T07:05:04","guid":{"rendered":"https:\/\/www.huashu-tech.com\/?p=7992"},"modified":"2024-02-27T19:25:06","modified_gmt":"2024-02-27T11:25:06","slug":"nano-dunes-with-the-ion-beam-new-method-for-self-organized-nanostructures","status":"publish","type":"post","link":"https:\/\/www.huashu-tech.com\/vi\/nano-dunes-with-the-ion-beam-new-method-for-self-organized-nanostructures\/","title":{"rendered":"C\u1ed3n c\u00e1t nano v\u1edbi ch\u00f9m ion: Ph\u01b0\u01a1ng ph\u00e1p m\u1edbi cho c\u1ea5u tr\u00fac nano t\u1ef1 t\u1ed5 ch\u1ee9c"},"content":{"rendered":"

Nhi\u1ec1u thi\u1ebft b\u1ecb b\u00e1n d\u1eabn trong c\u00f4ng ngh\u1ec7 hi\u1ec7n \u0111\u1ea1i \u2013 t\u1eeb m\u1ea1ch t\u00edch h\u1ee3p \u0111\u1ebfn pin m\u1eb7t tr\u1eddi v\u00e0 \u0111\u00e8n LED \u2013 \u0111\u1ec1u d\u1ef1a tr\u00ean c\u1ea5u tr\u00fac nano. Vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c m\u1ea3ng c\u1ea5u tr\u00fac nano th\u00f4ng th\u01b0\u1eddng th\u01b0\u1eddng \u0111\u00f2i h\u1ecfi n\u1ed7 l\u1ef1c \u0111\u00e1ng k\u1ec3. N\u1ebfu ch\u00fang \u0111\u01b0\u1ee3c t\u1ef1 t\u1ed5 ch\u1ee9c, vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb nh\u01b0 v\u1eady s\u1ebd nhanh h\u01a1n \u0111\u00e1ng k\u1ec3 v\u00e0 do \u0111\u00f3 chi ph\u00ed s\u1ebd gi\u1ea3m xu\u1ed1ng. Ti\u1ebfn s\u0129 Stefan Facsko t\u1eeb Helmholtz-Zentrum Dresden-Rossendorf (HZDR) v\u00e0 Ti\u1ebfn s\u0129 Xin Ou t\u1eeb Vi\u1ec7n Vi h\u1ec7 th\u1ed1ng v\u00e0 C\u00f4ng ngh\u1ec7 th\u00f4ng tin Th\u01b0\u1ee3ng H\u1ea3i (SIMMIT), Vi\u1ec7n H\u00e0n l\u00e2m Khoa h\u1ecdc Trung Qu\u1ed1c, hi\u1ec7n \u0111\u00e3 tr\u00ecnh di\u1ec5n m\u1ed9t ph\u01b0\u01a1ng ph\u00e1p t\u1ef1 t\u1ed5 ch\u1ee9c c\u00e1c m\u1ea3ng c\u1ea5u tr\u00fac nano th\u00f4ng qua chi\u1ebfu x\u1ea1 ch\u00f9m ion r\u1ed9ng. K\u1ebft qu\u1ea3 \u0111\u00e3 \u0111\u01b0\u1ee3c c\u00f4ng b\u1ed1 tr\u00ean t\u1ea1p ch\u00ed khoa h\u1ecdc\u00a0quy m\u00f4 nano<\/i>.<\/p>\n

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Trong ph\u01b0\u01a1ng ph\u00e1p \u0111\u00e1ng kinh ng\u1ea1c c\u1ee7a h\u1ecd, c\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u s\u1eed d\u1ee5ng ch\u00f9m ion, l\u00e0 nh\u1eefng nguy\u00ean t\u1eed t\u00edch \u0111i\u1ec7n nhanh. Ch\u00fang chi\u1ebfu m\u1ed9t ch\u00f9m ion kh\u00ed hi\u1ebfm v\u00e0o m\u1ed9t\u00a0gali arsenua<\/a>\u00a0wafer, v\u00ed d\u1ee5, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t b\u00f3ng b\u00e1n d\u1eabn t\u1ed1c \u0111\u1ed9 cao v\u00e0 t\u1ea7n s\u1ed1 cao, t\u1ebf b\u00e0o quang \u0111i\u1ec7n ho\u1eb7c \u0111i\u1ed1t ph\u00e1t s\u00e1ng. \u201cNg\u01b0\u1eddi ta c\u00f3 th\u1ec3 so s\u00e1nh vi\u1ec7c b\u1eafn ph\u00e1 ion v\u1edbi vi\u1ec7c phun c\u00e1t. \u0110i\u1ec1u n\u00e0y c\u00f3 ngh\u0129a l\u00e0 c\u00e1c ion b\u1ecb t\u00e1ch ra kh\u1ecfi b\u1ec1 m\u1eb7t c\u1ee7a m\u1ee5c ti\u00eau. \u1ede \u0111\u00f3, mong mu\u1ed1n\u00a0c\u1ea5u tr\u00fac nano<\/a>\u00a0\u0111\u1ec1u do ch\u00ednh h\u1ecd t\u1ea1o ra,\u201d Ti\u1ebfn s\u0129 Facsko gi\u1ea3i th\u00edch. C\u1ea5u tr\u00fac \u0111\u1ec1u \u0111\u1eb7n v\u00e0 \u0111\u01b0\u1ee3c ch\u1ea1m kh\u1eafc tinh x\u1ea3o g\u1ee3i nh\u1edb \u0111\u1ebfn nh\u1eefng c\u1ed3n c\u00e1t, nh\u1eefng c\u1ea5u tr\u00fac t\u1ef1 nhi\u00ean \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1edfi gi\u00f3. Tuy nhi\u00ean, t\u1ea5t c\u1ea3 \u0111\u1ec1u x\u1ea3y ra trong m\u1ed9t th\u1ebf gi\u1edbi nano, v\u1edbi kho\u1ea3ng c\u00e1ch ch\u1ec9 50 nanomet gi\u1eefa hai c\u1ed3n c\u00e1t \u2013 s\u1ee3i t\u00f3c c\u1ee7a con ng\u01b0\u1eddi d\u00e0y h\u01a1n hai ngh\u00ecn l\u1ea7n.<\/p>\n

B\u1eafn ph\u00e1 ion \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n

Tuy nhi\u00ean, \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng, ch\u00f9m ion ph\u00e1 h\u1ee7y c\u1ea5u tr\u00fac tinh th\u1ec3 c\u1ee7a gali arsenide v\u00e0 do \u0111\u00f3 ph\u00e1 h\u1ee7y t\u00ednh ch\u1ea5t b\u00e1n d\u1eabn c\u1ee7a n\u00f3. Do \u0111\u00f3, nh\u00f3m c\u1ee7a Ti\u1ebfn s\u0129 Facsko t\u1ea1i Trung t\u00e2m Tia ion c\u1ee7a HZDR t\u1eadn d\u1ee5ng c\u01a1 h\u1ed9i l\u00e0m n\u00f3ng m\u1eabu trong qu\u00e1 tr\u00ecnh b\u1eafn ph\u00e1 ion. \u1ede nhi\u1ec7t \u0111\u1ed9 kho\u1ea3ng b\u1ed1n tr\u0103m \u0111\u1ed9 C, c\u00e1c c\u00f4ng tr\u00ecnh b\u1ecb ph\u00e1 h\u1ee7y s\u1ebd ph\u1ee5c h\u1ed3i nhanh ch\u00f3ng.<\/p>\n

M\u1ed9t hi\u1ec7u \u1ee9ng n\u1eefa \u0111\u1ea3m b\u1ea3o r\u1eb1ng c\u00e1c c\u1ed3n nano tr\u00ean b\u1ec1 m\u1eb7t ch\u1ea5t b\u00e1n d\u1eabn ph\u00e1t tri\u1ec3n. C\u00e1c ion va ch\u1ea1m kh\u00f4ng ch\u1ec9 l\u00e0m d\u1ecbch chuy\u1ec3n c\u00e1c nguy\u00ean t\u1eed m\u00e0 ch\u00fang va ch\u1ea1m m\u00e0 c\u00f2n \u0111\u00e1nh b\u1eadt ho\u00e0n to\u00e0n c\u00e1c nguy\u00ean t\u1eed ri\u00eang l\u1ebb ra kh\u1ecfi m\u00f4i tr\u01b0\u1eddng.\u00a0c\u1ea5u tr\u00fac tinh th\u1ec3<\/a>. V\u00ec asen d\u1ec5 bay h\u01a1i kh\u00f4ng c\u00f2n li\u00ean k\u1ebft tr\u00ean b\u1ec1 m\u1eb7t n\u00ean b\u1ec1 m\u1eb7t s\u1edbm ch\u1ec9 bao g\u1ed3m c\u00e1c nguy\u00ean t\u1eed gali. \u0110\u1ec3 b\u00f9 \u0111\u1eafp cho c\u00e1c li\u00ean k\u1ebft nguy\u00ean t\u1eed asen b\u1ecb thi\u1ebfu, c\u00e1c c\u1eb7p nguy\u00ean t\u1eed gali h\u00ecnh th\u00e0nh, ch\u00fang t\u1ef1 s\u1eafp x\u1ebfp th\u00e0nh h\u00e0ng d\u00e0i. N\u1ebfu\u00a0ch\u00f9m ion<\/a>\u00a0\u0111\u00e1nh b\u1eadt c\u00e1c nguy\u00ean t\u1eed ti\u1ebfp theo b\u00ean c\u1ea1nh ch\u00fang, c\u00e1c c\u1eb7p gali kh\u00f4ng th\u1ec3 tr\u01b0\u1ee3t xu\u1ed1ng b\u1eadc \u0111\u00e3 \u0111\u01b0\u1ee3c t\u1ea1o ra v\u00ec nhi\u1ec7t \u0111\u1ed9 qu\u00e1 th\u1ea5p \u0111\u1ec3 \u0111i\u1ec1u n\u00e0y x\u1ea3y ra. \u0110\u00e2y l\u00e0 c\u00e1ch c\u00e1c h\u00e0ng d\u00e0i c\u00e1c c\u1eb7p gali t\u1ea1o th\u00e0nh c\u00e1c \u0111\u1ee5n nano sau m\u1ed9t th\u1eddi gian, trong \u0111\u00f3 m\u1ed9t s\u1ed1 c\u1eb7p d\u00e2y d\u00e0i n\u1eb1m c\u1ea1nh nhau.<\/p>\n

C\u1ea7n c\u00f3 nhi\u1ec1u th\u00ed nghi\u1ec7m \u1edf c\u00e1c nhi\u1ec7t \u0111\u1ed9 kh\u00e1c nhau v\u00e0 t\u00ednh to\u00e1n to\u00e0n di\u1ec7n \u0111\u1ec3 v\u1eeba b\u1ea3o to\u00e0n tr\u1ea1ng th\u00e1i tinh th\u1ec3 c\u1ee7a v\u1eadt li\u1ec7u b\u00e1n d\u1eabn v\u1eeba t\u1ea1o ra c\u00e1c c\u1ea5u tr\u00fac \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh r\u00f5 \u1edf c\u1ea5p \u0111\u1ed9 nano. Ti\u1ebfn s\u0129 Facsko t\u1eeb HZDR cho bi\u1ebft, \u201cPh\u01b0\u01a1ng ph\u00e1p epit Wax ngh\u1ecbch \u0111\u1ea3o ho\u1ea1t \u0111\u1ed9ng v\u1edbi nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u kh\u00e1c nhau nh\u01b0ng v\u1eabn \u0111ang trong giai \u0111o\u1ea1n nghi\u00ean c\u1ee9u c\u01a1 b\u1ea3n. B\u1edfi v\u00ec ch\u00fang t\u00f4i s\u1eed d\u1ee5ng c\u00e1c ion n\u0103ng l\u01b0\u1ee3ng \u0111\u1eb7c bi\u1ec7t th\u1ea5p \u2013 d\u01b0\u1edbi 1 kilovolt \u2013 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p \u0111\u01a1n gi\u1ea3n n\u00ean ch\u00fang t\u00f4i hy v\u1ecdng r\u1eb1ng ch\u00fang t\u00f4i c\u00f3 th\u1ec3 ch\u1ec9 \u0111\u01b0\u1eddng cho vi\u1ec7c tri\u1ec3n khai c\u00f4ng nghi\u1ec7p. Vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c c\u1ea5u tr\u00fac t\u01b0\u01a1ng t\u1ef1 v\u1edbi c\u00e1c ph\u01b0\u01a1ng ph\u00e1p hi\u1ec7n \u0111\u1ea1i c\u1ea7n nhi\u1ec1u n\u1ed7 l\u1ef1c h\u01a1n.\u201d<\/p>","protected":false},"excerpt":{"rendered":"

Many semiconductor devices in modern technology – from integrated circuits to solar cells and LEDs – are based on nanostructures. Producing arrays of regular nanostructures usually requires substantial effort. If they were self-organized, the production of such devices would be considerably faster and the costs would therefore sink. Dr. Stefan Facsko from the Helmholtz-Zentrum Dresden-Rossendorf<\/p>","protected":false},"author":1,"featured_media":7999,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[1,321],"tags":[],"acf":[],"_links":{"self":[{"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/posts\/7992"}],"collection":[{"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/comments?post=7992"}],"version-history":[{"count":1,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/posts\/7992\/revisions"}],"predecessor-version":[{"id":8000,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/posts\/7992\/revisions\/8000"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/media\/7999"}],"wp:attachment":[{"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/media?parent=7992"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/categories?post=7992"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.huashu-tech.com\/vi\/wp-json\/wp\/v2\/tags?post=7992"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}